Substance
ID:340884
Names and Identifiers
IUPAC name
disilane
IUPAC Traditional name
disilane
Synonyms
乙硅烷Disilane
Properties
Product Information
Impurities
≤50 ppm Higher silanes
<1 ppm Water
<5 ppm Siloxanes
<1 ppm THC
<1 ppm Argon (Ar) + Oxygen (O2)
<1 ppm Carbon dioxide (CO2)
<0.2 ppm Chlorosilanes
<1 ppm Nitrogen (N2)
Grade
electronic grade
Linear Formula
Si2H6
Safety Information
GHS Pictograms
Gases under pressure
Compressed gases
Liquefied gases
Refrigerated Liquefied gases
Dissolved gases
Acute toxicity (oral, dermal, inhalation), category 4
Skin irritation, category 2
Eye irritation, category 2
Skin sensitisation, category 1
Specific Target Organ Toxicity – Single exposure, category 3
Flammable gases, category 1
Flammable aerosols, categories 1,2
Flammable liquids, categories 1,2,3
Self-reactive substances and mixtures, Types B,C,D,E,F
Pyrophoric liquids, category 1
Pyrophoric solids, category 1
Self-heating substances and mixtures
Substances and mixtures, which in contact with water, emit flammable gases, categories 1,2,3
Organic peroxides, Types B,C,D,E,F
Respiratory sensitization, category 1
Germ cell mutagenicity, categories 1A,1B,2
Carcinogenicity, categories 1A,1B,2
Reproductive toxicity, categories 1A,1B,2
Specific Target Organ Toxicity – Single exposure, categories 1,2
Specific Target Organ Toxicity – Repeated exposure, categories 1,2
Aspiration Hazard, category 1
European Hazard Symbols
Flammable (F)
Harmful (Xn)Personal Protective Equipment
Eyeshields, Faceshields, Gloves, half-mask respirator (US), multi-purpose combination respirator cartridge (US)
Risk Statements
17-20/21-36/37/38-42
German water hazard class
3
GHS Signal Word
Danger
GHS Hazard statements
H220-H280-H312-H315-H319-H332-H334-H335
GHS Precautionary statements
P210-P261-P280-P305+P351+P338-P342+P311-P410+P403
Safety Statements
16-24-26-36/37/39
Hazard Class
2.1
RID/ADR
UN 3161 2.1
UN Number
3161
MSDS Link
Physical Property
Apperance
gas
Melting Point
-132.6 °C(lit.)
Flash Point
<10 °C
<50 °F
Boiling Point
-14.5 °C(lit.)
Transition Temperature
critical temperature 150.9 °C
Molecule Details
Features and Benefits
Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD).2 Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium.3 Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.4
General description
Atomic number of base material: 14 Silicon
Packaging
20 g in ss cylinder
Application
Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1
Recommended products
Stainless steel regulators Z527416 or Z527424 are recommended.
Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD).2 Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium.3 Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.4
General description
Atomic number of base material: 14 Silicon
Packaging
20 g in ss cylinder
Application
Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1
Recommended products
Stainless steel regulators Z527416 or Z527424 are recommended.
Molecular Spectra
No Data Available
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References
No Data Available
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