Substance
ID:341681
Names and Identifiers
IUPAC name
methylsilane
IUPAC Traditional name
silane, methyl-
Synonyms
Methylsilane甲基硅烷
Registration numbers
CAS Number
MDL Number
PubChem SID
Beilstein Number
EC Number
Properties
Product Information
Grade
electronic grade
Linear Formula
CH3SiH3
Impurities
<10 ppm Nitrogen (N2)
<50 ppm Methane (CH4)
<100 ppm Dimethylsilane (CH3)2SiH2
<50 ppm Silane (SiH4)
<10 ppm Carbon dioxide (CO2)
<100 ppm Methylchlorosilane CH3SiH2Cl
<2 ppm Argon + Oxygen (Ar + O2)
Purity
≥99.9%
Physical Property
Melting Point
-157 °C(lit.)
Boiling Point
-57 °C(lit.)
Apperance
liquid
Vapor Density
0.628 (-58 °C, vs air)
Safety Information
GHS Hazard statements
H220-H280-H312-H332
European Hazard Symbols
Highly flammable (F+)
Harmful (Xn)GHS Precautionary statements
P210-P280-P410+P403
RID/ADR
UN 3161 2.1
Hazard Class
2.1
GHS Pictograms
Flammable gases, category 1
Flammable aerosols, categories 1,2
Flammable liquids, categories 1,2,3
Self-reactive substances and mixtures, Types B,C,D,E,F
Pyrophoric liquids, category 1
Pyrophoric solids, category 1
Self-heating substances and mixtures
Substances and mixtures, which in contact with water, emit flammable gases, categories 1,2,3
Organic peroxides, Types B,C,D,E,F
Acute toxicity (oral, dermal, inhalation), category 4
Skin irritation, category 2
Eye irritation, category 2
Skin sensitisation, category 1
Specific Target Organ Toxicity – Single exposure, category 3
Gases under pressure
Compressed gases
Liquefied gases
Refrigerated Liquefied gases
Dissolved gases
Risk Statements
12-14-20/21
Supplemental Hazard Statements
Reacts violently with water.
UN Number
3161
MSDS Link
Personal Protective Equipment
Eyeshields, Faceshields, Gloves, half-mask respirator (US), multi-purpose combination respirator cartridge (US)
Safety Statements
16-24-26-36/37/39
GHS Signal Word
Danger
German water hazard class
3
Molecule Details
Packaging
10, 20 g in ss cylinder
Features and Benefits
Methylsilane is used in the plasma-assisted CVD of silicon carbide (SiC) and as a precursor to the epitaxial growth of SiGeC alloy layers via rapid thermal CVD.1 Recent developments include the use of methylsilane as a precursor to silicon-carbon-hydrogen polymer used as photoresists.
Precursor to silicon carbide or alloy thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE).
Recommended products
Stainless steel regulators Z527416 or Z527424 are recommended.
10, 20 g in ss cylinder
Features and Benefits
Methylsilane is used in the plasma-assisted CVD of silicon carbide (SiC) and as a precursor to the epitaxial growth of SiGeC alloy layers via rapid thermal CVD.1 Recent developments include the use of methylsilane as a precursor to silicon-carbon-hydrogen polymer used as photoresists.
Precursor to silicon carbide or alloy thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE).
Recommended products
Stainless steel regulators Z527416 or Z527424 are recommended.
Molecular Spectra
No Data Available
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References
No Data Available
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